Novosibirskiy gosudarstvennyy tehnicheskiy universitet
Novosibirskiy gosudarstvennyy tehnicheskiy universitet
UDC 537.523.9
UDC 533.9.082
UDC 533.9...15
CSCSTI 29.33
Russian Classification of Professions by Education 03.04.02
Russian Library and Bibliographic Classification 223
Russian Trade and Bibliographic Classification 6135
BISAC TEC019000 Lasers & Photonics
The paper is devoted to the study of the electron number density of an atmospheric pressure hybrid plasma supported by microwave radiation (2.47 GHz) and a CO2 laser (10.6 μm) in the chamber of an experimental plasma-chemical reactor developed to study the synthesis of diamond-like and other coatings. The reactor is based on a microwave resonator on the TM012 mode of a quasi-cylindrical shape, into which focused radiation of a CO2 laser is introduced simultaneously with microwave radiation. The shapes of the atomic hydrogen Hα line emitted by microwave and hybrid plasma in H2:Ar:CH4 mixtures are studied. The shapes of the Hα line in the hybrid plasma spectra, in contrast to the shapes of this line emitted by microwave plasma, approximated by the Lorentz function, have wide wings and are described by the Lorentz function with a two-contour approximation, which indicates a significant spatio-temporal inhomogeneity of the hybrid plasma. The density of electrons in the atmospheric pressure microwave plasma measured by the Stark broadening of the Hα lines are in the range of 5×1014-1016 cm-3. In the hybrid plasma, the density of electrons corresponding to the contour with a smaller half-width slightly exceeds the density of electrons in the microwave plasma and is in the range of 1015-5×1016 cm-3. In the case of focusing laser radiation in the region of a microwave plasma bunch, the density of electrons measured by the contour with a larger half-width is ~1017 cm-3.
microwave discharge, laser plasma, density of electrons, Stark broadening, two-contour approximation, spatio-temporal inhomogeneity.
1. Konov V.I., Prokhorov A.M., Uglov S.A., Bolshakov A.P., Leontiev I.A., Dausinger F., Hügel H., Angstenberger B., Sepold G., Metev S. CO2 laser-induced plasma CVD synthesis of diamond //Appl. Phys. A. 1998. V. 66. P. 575–578.
2. Vikharev A.L. , Gorbachev A.M., Lobaev M.A., Radishev D.B. Multimode cavity type MPACVD reactor for large area diamond film deposition // Diamond and Related Materials. 2018. V. 83. P. 8–14.
3. Weng J., Liu F., Xiong L.W., Wang J.H., Sun Q. Deposition of large area uniform diamond films by microwave plasma CVD // Vacuum. 2018. V.147, P.134-142.
4. Rayzer Yu.P. Lazernaya iskra i rasprostranenie razryadov.– M.: Nauka, 1974.–308 s.
5. Yamada H., Chayahara A., Mokuno Y., Shikata S. Microwave plasma generated in a narrow gap to achieve high power efficiency during diamond growth // Diamond & Related Materials. 2009. V.18. P.117–120.
6. Gicquel A., Chenevier M., Hassouni Kh., Tserepi A., Dubus M. Validation of actinometry for estimating relative hydrogen atom densities and electron energy evolution in plasma assisted diamond deposition reactors //J. Appl. Phys. 1998. V.83. P. 7504.
7. Ma Z., Wu C., Wang J., Zhao H., Zhang L., Fu Q., Wang C. Development of a plate-to-plate MPCVD reactor configuration for diamond synthesis // Diamond & Related Materials. 2016. V. 66, P.135-140.
8. Medvedev A.E., Pinaev P.A. Lazerno-plazmennyy sintez pri kompleksnom vozdeystvii lazernoy plazmy i SVCh polya / XLVI Mezhdunarodnaya (Zvenigorodskaya) konferenciya po fizike plazmy i UTS, 18 – 22 marta 2019 g. Sbornik tezisov, C. 216.
9. Plazma v lazerah. Per. sangl. / Pod red. Dzh. Bekefi.– Moskva, Energoatomizdat, 1982. – 416 s.
