Belarus
Belarus
Belarus
UDC 621.373.8
CSCSTI 29.33
Russian Classification of Professions by Education 12.03.05
Russian Library and Bibliographic Classification 223
Russian Trade and Bibliographic Classification 6135
BISAC TEC019000 Lasers & Photonics
The work is devoted to the study of the characteristics of an electric-discharge excimer laser on xenon chloride, with a modular implementation of the excitation system. Attention is paid to the development and optimization of the laser design, providing an output radiation energy of up to 1.8 J per pulse. The discharge excitation system consisted of six modules synchronously operating on a common load. The synchronicity of the modules was no worse than 5 ns. The results of an experimental study of the energy and time characteristics of laser radiation depending on the composition and pressure of the working mixture, charging voltage, and parameters of the discharge excitation circuit are presented. It is shown that the optimal working medium is HC1:Xe:Ne - 1:17:2000 at a total pressure of 4 atmospheres. The duration of the generation pulse was 60-150 ns depending on the parameters of the excitation system modules.
excimer laser, excimer molecule, xenon chloride, electric discharge XeCl laser, pulsed discharge, discharge electrodes.
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