00873naa#a2200229#i#450# EN\\bibl\16988 20251001121508.3 20250913b2025####ek#y0engy0150####ca RU Manufacturing technology of passive elements of optoelectronic microwave boards with air bridges Conference article/thesis Tomsk V.E. Zuev Institute of Atmospheric Optics, Siberian Branch of the Russian Academy of Sciences 2025 2 с. Физика. 03.04.02 local Conference article/thesis local Аппаратура и методы радиосвязи. 621.396 Физика. 223 bbk Оптика. 6135 tbk Оптика. 29.31 grnti Baboshko D. V. Shesterikov Evgeniy V. Udalov A. A. iao.editorum.ru