00873naa#a2200229#i#4500001001500000005001700015100004100032102000700073200012800080210011100208215001000319606003400329608003700363675007100400686002700471686002800498686003100526700002000557700002800577700001800605856002000623EN\\bibl\1698820251127143839.4##a20251014b2025####ek#y0engy0150####ca##aRU1#aManufacturing technology of passive elements of optoelectronic microwave boards with air bridgeseConference article/thesis1#aTomskcV.E. Zuev Institute of Atmospheric Optics, Siberian Branch of the Russian Academy of Sciencesd2025##a2 с.##aФизика. 03.04.022local##aConference article/thesis2local##aАппаратура и методы радиосвязи. 621.396##aФизика. 2232bbk##aОптика. 61352tbk##aОптика. 29.312grnti#1aBaboshkogD. V.#1aShesterikovgEvgeniy V.#1aUdalovgA. A.4#aiao.editorum.ru