TY CONF TI Manufacturing technology of passive elements of optoelectronic microwave boards with air bridges KW hybrid integrated circuits KW optoelectronic boards KW air bridge connections KW radar systems JO XVII International conference on pulsed lasers and laser applications – AMPL-2025 AU Baboshko, D.V. AU Shesterikov, E.V. AU Udalov, A.A. PY 2025 PB V.E. Zuev Institute of Atmospheric Optics, Siberian Branch of the Russian Academy of Sciences